Tag: Technical
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ASML’s Cleanliness Grades 2 and 4 in Element ─ A Technical Evaluation
Cleanliness is a essential but usually ignored requirement in photolithography for semiconductor manufacturing. Contamination can severely hamper efficiency and cut back lithographic yields. ASML, the main producer of superior photolithography methods, acknowledges that intensive cleanliness administration is crucial for his or her instruments to perform at specified throughputs. To allow rational high quality management, ASML…